Growth of TiO2 thin film on various substrates using RF magnetron sputtering

Riyaz Ahmad , Mohamed Ali and Nayan, Nafarizal (2010) Growth of TiO2 thin film on various substrates using RF magnetron sputtering. Universiti Tun Hussein Onn Malaysia. (Unpublished)

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Abstract

The dependence of electrical conductivity of Titanium Dioxide (TiO2) thin film is one of important characteristic in solar cell application. Previous study reported that the film at the nanoscale thickness, changed its properties when compared to bulk material [1,2]. The electrical conductivity to TiO2 thin film deposited on several substrate will be discuss in this study.

Item Type:Other
Subjects:T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK1001-1841 Production of electric energy or power. Powerplants. Central stations
Divisions:Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
ID Code:3016
Deposited By:Normajihan Abd. Rahman
Deposited On:13 Feb 2013 15:49
Last Modified:13 Feb 2013 15:49

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