Improved resistivity and surface morphology of laser treated Cr/Pd metal contact sputter deposited on Si

Ahmad, Rabiatul Adawiah and Ali, Ahmad Hadi and Isiyaku, Aliyu Kabiru and Bhari, Bibi Zulaika (2017) Improved resistivity and surface morphology of laser treated Cr/Pd metal contact sputter deposited on Si. Journal of Science and Technology, 9 (3). pp. 101-105. ISSN 2229-8460

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Abstract

In this paper Cr/Pd metal contacts were deposited on Si by using DC magnetron sputtering. The metal contacts were treated using infrared Nd:YAG pulsed laser at different laser pulse energy. The metal contacts were characterized based on electrical, optical and morphology properties by using four-point probes, ultraviolet-visible spectroscopy (UV-Vis) and atomic force microscope (AFM). Measurement obtained from four point probes shown lowest resistivity values for post treatment sample after treated with 25 mJ laser pulsed energy. The measured value is 6.75 × 10-5 Ohm-cm as compared to the as-deposited sample of 1.060 × 10-4 Ohm-cm. The scanned data using UV-Vis shown the characteristics of the thin metal contacts to absorbing light spectrum, whereas reflect light in visible wavelength range. Meanwhile, AFM results confirmed the post-treatment sample has smoother surface as compared to the as-deposited sample.

Item Type:	Article
Uncontrolled Keywords:	DC Magnetron Sputtering; Nd:YAG pulsed laser; Thin film; Substrate; Resistivity.
Subjects:	T Technology > TN Mining engineering. Metallurgy > TN600-799 Metallurgy
Divisions:	Faculty of Applied Science and Technology > Department of Physics and Chemistry
Depositing User:	Miss Nur Rasyidah Rosli
Date Deposited:	16 Dec 2021 05:32
Last Modified:	16 Dec 2021 05:32
URI:	http://eprints.uthm.edu.my/id/eprint/4757

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