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Capacitive displacement sensors in nano-scale applications

Abdin Elamin, Abdin Yousif and Abdul Rahim, Ruzairi and Pusppanathan, Jaysuman and Abas, Khairul Hamimah (2017) Capacitive displacement sensors in nano-scale applications. In: Sensor & Instrumentation System. Series 5 . Penerbit UTHM, pp. 107-113. ISBN 9789672110538

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Abstract

Over the past couple decades, the advancement and expansion in Nanotechnology played a crucial role in shifting every aspect of engineering and science with implications ranging from manufacturing, medicine, economics to human’s day to day activities. Nanotechnology is concerned with developing electronic devices, bio science/technology, and new advanced materials which have dimensions less than 100 nm. One important Nano-scale application is Nanopositioning. A Nanopositioning system is an electromechanical device for steering an object. A basic Nanopositioner consists of stationary and moving platform, displacement sensors, actuators and a control system. These devices measure displacements between one and one-hundred micrometers with a resolution of one nanometer or less. Other applications include nanofabrication, data storage, cell surgery, and precision optics [1].

Item Type: Book Section
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Electrical and Electronic Engineering > Department of Robotic and Mechatronic Engineering
Depositing User: Mr. Mohammad Shaifulrip Ithnin
Date Deposited: 11 Feb 2019 00:51
Last Modified: 11 Feb 2019 00:51
URI: http://eprints.uthm.edu.my/id/eprint/10575
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