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Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film

Bhari, Bibi Zulaika and Ali, Ahmad Hadi and Isiyaku, Aliyu Kabiru and Ahmad, Rabiatul Adawiah (2017) Comparative study of infrared Nd:YAG pulsed laser radiation on Pt thin film. Journal of Science and Technology, 9 (3). pp. 83-86. ISSN 26007924

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This paper investigated on infrared Nd:YAG pulsed laser radiation on platinum (Pt) thin films. Pt thin films were deposited on Si by DC magnetron sputtering. Then, the deposited thin films were radiated by infrared Nd:YAG pulse laser at different laser energy. The radiated thin films were analysed based on the electrical and surface morphological properties. Four-point probe measurement shows that, the lowest resistivity was recorded when the energy laser are 110-170 mJ. Surface morphology scanned by scanning electron microscope (SEM) revealed that the surface of sample with lowest resistivity after radiated with laser is smoother than the as-deposited thin films. After laser radiation, the grain sizes of thin films increases due to the grain agglomeration on the surface area.

Item Type: Article
Uncontrolled Keywords: Pt thin films; Nd:YAG; laser radiation; resistivity; surface morphology
Subjects: Q Science > QC Physics
Depositing User: Mr. Mohammad Shaifulrip Ithnin
Date Deposited: 30 Apr 2019 01:07
Last Modified: 30 Apr 2019 01:07
URI: http://eprints.uthm.edu.my/id/eprint/10998
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