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A problem-based learning approach in teaching mask design for mosfet fabrication

Sulong , Muhammad Suhaimi and Sahdan, Mohd Zainizan and Saim, Hashim and Mohd Tawil, Siti Nooraya and Sanudin, Rahmat and Morsin, Marlia (2007) A problem-based learning approach in teaching mask design for mosfet fabrication. In: 2nd Regional Conference On Engineering Education (RCEE 2007), Johor Bahru.


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Problem-based learning (PBL) has been introduced at Universiti Tun Hussein Onn Malaysia (UTHM) for almost two years as a new innovative teaching method for engineering education. This paper highlights an alternative way of teaching mask design for MOSFET fabrication using PBL approach as a student centered-learning approach. The learning process has been successful using the Facts-Ideas-Learning Issues-Action Plans (FILA) chart as a PBL technique. Four groups of students have been assigned a project topic which meets the curriculum objectives and have industrial relevance. In this project, the students work independently; learning new Computer Aided Design (CAD) tools to create their own mask design using contact printing method. It is said to be a cost effective and simple technique for mask design. The students also have the opportunity to be involved "hands-on" in fabrication process of MOSFET (Metal-Oxide-Semiconductor Field Effect Transistor) where they perform the photolithography technique in order to transfer the pattern from the masks onto the wafer and hence complete the fabrication process. The fabrication process was done in UTHM Microelectronics Cleanroom. In addition, the students also prepare the presentation and the documentation of the project. The paper concludes by discussing the benefits and advantages to the students after completing the project.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: PBL; FILA chart; mask design; MOSFET fabrication
Subjects: L Education > LB Theory and practice of education > LB1024 Teaching (Principles and practice)
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
Depositing User: Normajihan Abd. Rahman
Date Deposited: 04 Oct 2011 07:31
Last Modified: 04 Oct 2011 07:31
URI: http://eprints.uthm.edu.my/id/eprint/1845
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