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Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas

Nayan, Nafarizal and Koichi, Sasaki Comparison between Ti atoms, Ti* ion’s and Ar atoms at metastable state densities in magnetron sputtering plasmas. Compilation of Papers - VOLUME 1.

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Abstract

In the present study, spatial distributions of relative Ti atom and Tit ion densities in magnetron sputtering plasmas have been measured using twodimensional laser-induced fluorescence (LIF) imaging spectroscopy. Then, the absolute densities of Ti atoms and Tit ions were evaluated using ultraviolet absorption (UVAS) spectroscopy. Spatial distributions of absolute density Ti atom and Ti* ion were determined by comparing the UVAS results with the results of spatial distribution by LIF spectroscopy. Ionization mechanisms of Ti were discussed from the experimental results. It was found that the ionization of Ti enhanced with the discharge gas pressure. In addition, the spatial distribution of Ar atom density at metastable state was also measured using LIF and it was compared with the density distributions of Ti* ions. The contribution of Penning ionization was discussed from the spatial distributions of Ar atom at metastable state.

Item Type: Article
Subjects: Q Science > QC Physics
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electrical Technology
Depositing User: Normajihan Abd. Rahman
Date Deposited: 06 Jun 2012 03:32
Last Modified: 06 Jun 2012 03:32
URI: http://eprints.uthm.edu.my/id/eprint/2473
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