Production and transport of carbon nanoparticles in high-pressure magnetron sputtering plasmas employing a graphite target

Tsutsumi, Takahiko and Takada, Noriharu and Nayan, Nafarizal and Sasaki, Koichi Production and transport of carbon nanoparticles in high-pressure magnetron sputtering plasmas employing a graphite target. Compilation of Papers - VOLUME 1.

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Abstract

The formation of carbon nanoparticles was observed in the gas phase of a magnetron sputtering plasma employing a graphite target, argon gas, and a dc power supply, when the plasma source was operated at a pressure higher than 200 mTorr. Nanoparticles were accumulated in the region just outside of the bright plasma. A part of nanoparticles leaked out from the accumulated region, and was transported toward the downstream side. When the electric potential of the substrate, which was placed in the downstream region, was floating, nanoparticles were trapped by the sheath electron field and were not transported to the substrate. When the substrate was biased at +15 V with respect to the ground potential, nanoparticles were transported efficiently to the substrate

Item Type:	Article
Subjects:	T Technology > T Technology (General)
Divisions:	Faculty of Electrical and Electronic Engineering > Department of Electrical Technology
Depositing User:	Normajihan Abd. Rahman
Date Deposited:	31 May 2012 08:10
Last Modified:	12 Jan 2016 02:51
URI:	http://eprints.uthm.edu.my/id/eprint/2477
Statistic Details:	View Download Statistic

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