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Deposition of titanium dioxide (TiO2) thin films using in-house nano-TiO2 powder

Sahdan, Mohd Zainizan and Alias, M.S. and Nayan, Nafarizal and Hashim, Uda (2012) Deposition of titanium dioxide (TiO2) thin films using in-house nano-TiO2 powder. In: 2nd International Conference on Transportation Geotechnics ICTG, 9-12 September 2012, Hokkaido University, Japan.


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The purpose of this study is to fabricate uniform TiO2 thin films using in-house TiO2 nanopowder. The nanopowder was obtained from a tin mining waste (Ilmenite) and its concentration was optimized during fabrication. The TiO2 thin films were characterized by an atomic force microscope (AFM), a surface profiler, an X-ray diffractometer, an Ultra violet- Visible (UV-Vis) and a current-voltage (I-V) measurement system. The relation of the uniformity and the properties of the TiO2 thin films will be discussed in detail in this paper.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: titanium dioxide (TiO2); ilmenite; thin films; solgel; atomic force microscope (AFM)
Subjects: T Technology > TP Chemical technology
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
Depositing User: Normajihan Abd. Rahman
Date Deposited: 25 Mar 2013 04:43
Last Modified: 21 Jan 2015 08:17
URI: http://eprints.uthm.edu.my/id/eprint/3452
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