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Design and simulation of mass-spring-dashpot system for RFMEMS switch

Jill, Susana and S., Suzieyana and Ahmad Alabqari , Ma'radzi (2013) Design and simulation of mass-spring-dashpot system for RFMEMS switch. In: 2013 IEEE International Conference on Control System, Computing and Engineering (ICCSCE 2013) , 29 November – 1 December 2013, Penang, Malaysia .


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Design and analysis the structure of the mass-springdashpot of the RFMEMS switch are presented in this work. Most familiar method applies in designing MEMS switch is the spring design with difference length and width. These two parameters affect the capability of the spring to support the mass during 'ON' and 'OFF' operation by applying Hooke’s Law to identify a suitable spring constant. The analysis is to observe the effects of the electrostatic parameter in terms of voltage, pull in stability, transient rise time, harmonic mode related to the spring movement and von Mises stress of the design. The MEMS switch using this cantilever beam was 15.9375 V of pull-in voltage and transient time of 12 μs. The spring constant for this cantilever beam is 79.9 N with quality factor of 0.0158.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: RFMEMS; microswitch; electrostatic pull-in
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
Depositing User: Normajihan Abd. Rahman
Date Deposited: 22 Sep 2014 08:38
Last Modified: 22 Sep 2014 08:38
URI: http://eprints.uthm.edu.my/id/eprint/4770
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