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Optical emission spectroscopy analysis during the growth of TiO2 thin film in magnetron sputtering discharge

Nayan, Nafarizal and Mohamed Ali, Riyaz Ahmad (2011) Optical emission spectroscopy analysis during the growth of TiO2 thin film in magnetron sputtering discharge. Materials Research Society, Singapore.


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Titanium dioxide (TiO2) thin film has been studied by many researchers due to its wide potential application in photonic devices. Ti02 thin film has been growth using various techniques such as sol-gel and sputtering deposition. One of the most promising technique to growth an advanced Ti02 thin film is reactive magnetron sputtering deposition. This technique has been an interesting technique due to its flexibility to control the growth of films and its deposition repeatability. In the present work, we investigate the optical emission spectroscopy of magnetron sputtering discharge using Ti solid target. The OES results are used to discuss the ionization mechanism in magnetron sputtering discharge and thus investigate its correlation with the deposited Ti02 thin film. We will propose an in-situ measurement and advanced technique to growth Ti02 thin film at a consistent property for any sputtering system. The magnetron sputtering discharge were produced using radio frequency (RF) power supply in Ar and Art02 as ambient gas. Ti target was used as sputter target. In Ar discharge we clearly observed spectrum peaks from Ti atoms and Ti ions emission. The peak intensity increased with the discharge power and discharge pressure. On the other hand, the peak of Ar at a metastable state, which is essential in the ionization process of Ti atoms, was almost consistent with the discharge pressure. In Ar and 0 2 discharge, the peaks fiom Ti atoms and Ti ions emission decreased drastically. This may be due to the reactive reaction between Ti and 0 2 in the plasma plume. This is clearly understood as we observed an enhancement in peak from 0 2 ion emission in A r t 0 2 discharges. This works were supported by Graduate Incentive Scheme of Universiti Tun Hussein Onn Malaysia and Fundamental Research Grant Scheme of Ministry of Higher Education, Malaysia.

Item Type: Other
Subjects: T Technology > T Technology (General)
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
Depositing User: Normajihan Abd. Rahman
Date Deposited: 13 Aug 2018 03:41
Last Modified: 13 Aug 2018 03:41
URI: http://eprints.uthm.edu.my/id/eprint/6058
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