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Cost effective mask design in CMOS transistor fabrication for undergraduates program

Morsin, Marlia and Sanudin, Rahmat and Sahdan, Mohd Zainizan and Sulong, Muhammad Suhaimi Cost effective mask design in CMOS transistor fabrication for undergraduates program. In: Proceedings of Encon2008 2nd Engineering Conference on Sustainable Engineering Infrastructures Development & Management, 18-19 December 2008, Kuching, Sarawak.


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This paper presents a new innovative way of teaching undergraduate program using low cost masks. In MOSFET fabrication, the cost to produce a complete mask set for pattern transfer process extremely high and not cost effective for undergraduates program. The purpose of these masks is to define certain functional region on a wafer. In this work, low cost masks have been fabricated with a simple technology. An economical solution of masks using transparency films with various channel lengths from 300 µm to 500 µm has been produced. Six layer photolithography masks of MOSFET were designed using AutoCAD drawing tools and then printed using high resolution laser printer on the transparency film. Contact printing method has been utilized to transfer the mask layouts onto a 4-inch silicon wafer using standard photolithography techniques to check the line uniformity. Optical observation using high power microscope shows that the mask layouts were successfully transferred onto photoresist with minimum variation. These masks are used to fabricate an n-well CMOS transistor and then tested using Keithley 2400 source meter with Lab-view measurement software. The cost effective mask design proposed was really practical for teaching microfabrication undergraduates program.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: AutoCAD; mask fabrication; metal oxide silicon field effect transistor (MOSFET), transparency film
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Electrical and Electronic Engineering > Department of Electronic Engineering
Date Deposited: 14 Jun 2015 08:02
Last Modified: 14 Jun 2015 08:02
URI: http://eprints.uthm.edu.my/id/eprint/6792
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