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A study of nano structure by roll to roll imprint lithography

Hassan, Suhaimi and Yusof, Mohd Sallehuddin and Maksud, M. I. and Nordin, M.N. and Rejab, Noor Azlina and Mamat, K.A. (2015) A study of nano structure by roll to roll imprint lithography. In: 2015 International Symposium on Technology Management and Emerging Technologies (ISTMET), 25-27 August 2015, Langkawi, Kedah, Malaysia.


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Imprint lithography process is a unique printing technique that create graphic, electronic and biomedical printed on substrates. PET plastics are an example of materials that can be used as printing substrate in producing nano-scale electronic and medical devices. Here, it is proposed that extending imprint lithography technique into the multiple nano-structure printing fine solid lines onto substrate. Imprint lithography is a low cost printing technique commonly used in manufacturing and printing industry. This study exhibit successful fine solid lines imprinting below 1 micrometer in line width, gap and height on polyethylene-terephthalate (PET) substrate. This paper illustrates the use of imprint lithography method in producing multiple nano-solid lines printing capability as application of printing electronic, graphic and bio-medical.

Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: imprinting lithography; nano-scale printing; roll to roll; solid lines
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering > TK7800-8360 Electronics
Divisions: Faculty of Mechanical and Manufacturing Engineering > Department of Manufacturing and Industrial Engineering
Depositing User: Normajihan Abd. Rahman
Date Deposited: 21 Sep 2015 07:46
Last Modified: 21 Sep 2015 07:46
URI: http://eprints.uthm.edu.my/id/eprint/7252
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