UTHM Institutional Repository

Investigation of ProTEX® PSB thin film as photosensitive layer for MEMS capacitive pressure sensor diaphragm based Si/SiC Wafer

Marsi, Noraini and Yeop Majlis, Burhanuddin and Hamzah, Azrul Azlan and Mohd-Yasin, Faisal (2013) Investigation of ProTEX® PSB thin film as photosensitive layer for MEMS capacitive pressure sensor diaphragm based Si/SiC Wafer. Australian Journal of Basic and Applied Sciences, 7 (12). pp. 315-319. ISSN 1991-8178

[img] PDF
noraini_masri.pdf

Download (247kB)

Abstract

Characterization of ProTEX® PSB thin films of newly developed photosensitive layer as alternative replacement for silicon nitride or silicon oxide wet etch masks. ProTEX® PSB thin films have been deposited on Si/SiC wafer for bulk micromachining technology in MEMS capacitive pressure sensor diaphragm to obtain a new recipe process flow of various factor. In this paper, we will discuss the process flow for ProTEX® PSB deposition to estimate the final film thickness that is defined by the spin-coating rotational speed, final cure temperature and hard bake time of ProTEX® PSB coatings. ProTEX® PSB thin films have been preliminary characterized by infinite focus microscopy (IFM) and scanning electron microscopy (SEM) to examine the substrate surface conditions and the effects of undercut edges structure. Based on these results, it was determined the optimum thickness of ProTEX® PSB is 2.133 μm with the spin speed of 3000 rpm. The recommended for the first bake temperature of 110 °C in 120 seconds and for the second bake temperature of 240 °C in 60 seconds. ProTEX® PSB can withstand the etch mask with etch rate of 1.28 μm/min for 8 hours and gives good quality effect of undercut edge on Si/SiC wafer.

Item Type: Article
Uncontrolled Keywords: ProTEX® PSB; photosensitive; bulk micromachining; MEMS capacitive pressure sensor; silicon carbide (SiC)
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Engineering Technology > Department of Mechanical Engineering Technology
Depositing User: Normajihan Abd. Rahman
Date Deposited: 10 Jan 2017 07:34
Last Modified: 10 Jan 2017 07:34
URI: http://eprints.uthm.edu.my/id/eprint/8085
Statistic Details: View Download Statistic

Actions (login required)

View Item View Item

Downloads

Downloads per month over past year