Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation

Ainuddin, Ainun Rahmahwati and Hakiri, Norio and Muto, Hiroyuki and Matsuda, Atsunori (2012) Micropatterning of non-crystalline methylsilsesquioxane–titania hybrid films based on their structural changes with UV irradiation. Physica Status Solidi A. pp. 1-7. ISSN 1862-6300

Text
AJ 2017 (243) Micropatterning of non-crystalline.pdf
Restricted to Registered users only
Download (2MB) | Request a copy

Official URL: http://dx.doi.org/10.1002/pssa.201228139

Abstract

Non-crystalline, transparent methylsilsesquioxane–titania hybrid ﬁlms for application in micropatterning were prepared from methyltriethoxysilane and titanium tetrabutoxide by the sol–gel method. The hybrid ﬁlms were heat-treated at 100 8C for 1 h and then irradiated with UV light using an ultrahigh-pressure mercury lamp. The refractive index of the ﬁlm increased as the amount of incorporated TiO2 increased. No changes in hardness were observed for the ﬁlms lacking TiO2 during UV irradiation, whereas adding a small amount of TiO2 caused the hardness to increase signiﬁcantly following UV irradiation. These changes in the physical properties of the ﬁlms with UV irradiation were caused by the cleavage of Si–C bonds in the ﬁlms induced by the photocatalytic effect of TiO2.On the basis of the changes in surface proﬁles, and optical, chemical, and mechanical properties induced by UV irradiation, it is concluded that the methylsilsesquioxane–titania ﬁlms are promising for micropatterning by photolithography.

Item Type:	Article
Uncontrolled Keywords:	Inorganic–organic hybrids; Micropattern; Sol–gel process; UV irradiation
Subjects:	Q Science > QC Physics T Technology > TJ Mechanical engineering and machinery
Divisions:	Faculty of Mechanical and Manufacturing Engineering > Department of Manufacturing Engineering
Depositing User:	Mrs. Siti Noraida Miskan
Date Deposited:	23 Dec 2021 08:27
Last Modified:	23 Dec 2021 08:27
URI:	http://eprints.uthm.edu.my/id/eprint/4920

Actions (login required)

View Item